ISO INTERNATIONAL STANDARD 18452 First edition 2005-11-15 Fine ceramics (advanced ceramics. advanced technical ceramics) Determination of thickness of ceramic films by contact-probe profilometer Céramiquestechniques- DeterminationdeI'epaisseurdesfilms ceramiquesavec unprofilometrea contact Reference number ISO18452:2005(E) ISO @ ISO 2005 ISO 18452:2005(E) PDF disclaimer This PDF file may contain embedded typefaces. In accordance with Adobe's licensing policy, this file may be printed or viewed but shall not be edited unless the typefaces which are embedded are licensed to and installed on the computer performing the editing. In accepts no liability in this area. Adobe is a trademark of Adobe Systems Incorporated. Details of the software products used to create this PDF file can be found in the General Info relative to the file; the PDF-creation parameters were optimized for printing. Every care has been taken to ensure that the file is suitable for use by ISO member bodies. In the unlikely event that a problem relating to it is found, please inform the Central Secretariat at the address given below. @ISO2005 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from either IsO at the address below or ISO's member body in the country of the requester. ISO copyright office Case postale 56·CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 749 09 47 E-mail [email protected] Web www.iso.org Published in Switzerland ii @ISO2005-Allrightsreserved ISO18452:2005(E) Contents Page 1 Scope 2 Normativereferences 3 Termsanddefinitions. 4 Principleofmeasurement 5 Testenvironment 6 Apparatus 2 Test pieces 3 7 8 Procedure... 9 Calculation 10 Limits to step height . 5 11 Test report 9 Annex A (informative)Effect of amplification factor and levelling error on measured layer thickness @ISO2005-All rightsreserved ili ISO18452:2005(E) Foreword IsO (the International Organization for Standardization) is a worldwide federation of national standards bodies Electrotechnical Commission (IEC) on allmatters of electrotechnical standardization. adopted by the technical committees are circulated to the member bodies for voting. Publication as an Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. IsO shall not be held responsible for identifying any or all such patent rights iv ISO2005-All rights reserved INTERNATIONALSTANDARD ISO18452:2005(E) Fine ceramics (advanced ceramics,advancedtechnical ceramics) Determination of thickness of ceramic films by contact-probe profilometer 1 Scope This International Standard specifies a method for the determination of the film thickness of a fine ceramic film and ceramic coatings by a contact-probe profilometer. The method is suitable for film thicknesses in the range of 10 nm to 10 000 nm. NOTE The method requires a distinct and clearly formed boundary between coated and uncoated parts of the substrate. 2 Normative references The following referenced documents are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including anyamendments)applies. ISO3274， Geometrical Product Specifications (GPS)- Surface texture: Profile method- Nominal characteristicsofcontact (stylus)instruments 3 Terms and definitions For the purposes of this document, the following terms and definitions apply. 3.1 fine ceramic film coating consisting of a fine ceramic material which thinly covers the substrate surface EXAMPLE Typical materials are oxides, carbides, nitrides, etc., deposited by methods such as vacuum evaporating, sputtering, chemical vapour deposition, etc. 4 Principle ofmeasurement substrate using a contact-probe profilometer. The film thickness shall be calculated fr